Photoacoustic system and associated method
OwnerBadhise BEN BAKIR, Olivier LARTIGUE +1inventors
InventorsBadhise BEN BAKIR, Olivier LARTIGUE, Christophe CONSTANCIAS
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Abstract
A photoacoustic system includes a semiconductor substrate including a hollow volume and a window extending in vertical alignment with a part of the hollow volume, and a surface emitting device including a waveguide and a diffraction grating, the waveguide having an upper face and a lower face, the lower face being disposed on the window, the diffraction grating being disposed on the upper face or on the lower face.
Claims17
A photoacoustic system comprising:
- a semiconductor substrate, the semiconductor substrate including a face forming an upper face, and an inner wall delimiting a hollow volume, the hollow volume extending into the semiconductor substrate at a distance from the upper face of said semiconductor substrate, the semiconductor substrate comprising at least one portion forming a window, transparent to an electromagnetic field, extending in vertical alignment with at least one part of the hollow volume and from the upper face of the semiconductor substrate up to the hollow volume, and
- at least one surface emitting device comprising an emitting face, said emitting face extending over said window, said at least one surface emitting device comprising:
- a waveguide comprising a first face and a second face, opposite to the first face, the waveguide comprising an active region configured to emit the electromagnetic field, and
- a diffraction grating having, along a first direction parallel to the emitting face of said device, a diffraction order greater than or equal to two,
- said diffraction grating extending over the first face of the waveguide, the emitting face being coincident with the second face of the waveguide;
- or said diffraction grating extending over the second face of the waveguide, the emitting face being coincident with the diffraction grating.
A method for manufacturing a photoacoustic system comprising, from a semiconductor substrate comprising a face forming an upper face:
- forming an inner wall delimiting a hollow volume, the hollow volume extending into the semiconductor substrate at a distance from the upper face of said semiconductor substrate so that the semiconductor substrate comprises at least one portion forming a window, transparent to an electromagnetic field, extending in vertical alignment with at least one part of the hollow volume and from the upper face of the semiconductor substrate to the hollow volume;
- manufacturing at least one surface emitting device extending over the window, said at least one device comprising:
- a waveguide comprising a first face and a second face, opposite to the first face, the second face resting on said at least one window, the waveguide comprising an active region parallel to the second face configured to emit the electromagnetic field, and
- a diffraction grating having a diffraction order greater than or equal to two and extending over the first face of the waveguide or over the second face of the waveguide.
Dependencies are inferred from the claim text.