Method for determining antenna rule for radio-frequency device
AssigneeUnited Microelectronics Corp.
InventorsXINGXING CHEN, Ching-Yang Wen, Purakh Raj Verma
Life of this patent
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Abstract
A method for determining antenna rule for a radio-frequency (RF) device includes the steps of forming a gate structure on a substrate, forming a source/drain region adjacent to the gate structure, forming a first metal routing on the source/drain region, and then forming a second metal routing on the gate structure. Preferably, a sum of an area of the first metal routing and an area of the second metal routing divided by an area of the gate structure is less than a ratio.
Claims18
A method for determining antenna rule for a radio-frequency (RF) device, comprising:
- forming a gate structure on a substrate;
- forming a source/drain region adjacent to the gate structure;
- forming a first metal routing on the source/drain region;
- and
- forming a second metal routing on the gate structure, wherein a sum of an area of the first metal routing and an area of the second metal routing divided by an area of the gate structure is less than a ratio.
A radio-frequency (RF) device, comprising:
- a gate structure on a substrate;
- a source/drain region adjacent to the gate structure;
- a first metal routing on the source/drain region;
- and
- a second metal routing on the gate structure, wherein a sum of an area of the first metal routing and an area of the second metal routing divided by an area of the gate structure is less than a ratio.
Dependencies are inferred from the claim text.