Method and device for locating contact through-hole (ct) positions in memory device
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsWenqi WANG, Ban WANG, Jinxing CHEN
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Abstract
A method of locating contact through-hole (CT) positions in a memory device includes: obtaining a bright voltage contrast (BVC) image including a plurality of CTs in the memory device; determining CT coordinates in the BVC image; validating the CT coordinates in the BVC image based on a golden CT layout to obtain validated CT coordinates in the BVC image; and locating the CT positions in the memory device based on the validated CT coordinates in the BVC image.
Claims20
A method of locating contact through-hole (CT) positions in a memory device, comprising:
- obtaining a bright voltage contrast (BVC) image including a plurality of CTs in the memory device;
- determining CT coordinates in the BVC image;
- validating the CT coordinates in the BVC image based on a golden CT layout to obtain validated CT coordinates in the BVC image;
- and
- locating the CT positions in the memory device based on the validated CT coordinates in the BVC image.
A device of locating contact through-hole (CT) positions in a memory device, comprising:
- a display screen;
- a memory storing program instructions;
- and
- a processor configured to execute the program instructions stored in the memory to:
- obtain a bright voltage contrast (BVC) image including a plurality of CTs in the memory device;
- determine CT coordinates in the BVC image;
- validate the CT coordinates in the BVC image based on a golden CT layout to obtain validated CT coordinates in the BVC image;
- and
- locate the CT positions in the memory device based on the validated CT coordinates in the BVC image.
Dependencies are inferred from the claim text.