Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object

A temperature conditioning system using conditioning liquid to condition a temperature of an object, the temperature conditioning system comprising:

• a conditioning conduit to guide conditioning liquid through or along the object, the conditioning conduit comprising a conditioning conduit inlet and a conditioning conduit outlet,
• a return conduit having a return conduit inlet and a return conduit outlet,
• a supply chamber having a supply chamber inlet connected to the return conduit outlet and a supply chamber outlet connected to the conditioning conduit inlet, and
• a discharge chamber having a discharge chamber inlet connected to the conditioning conduit outlet and a discharge chamber outlet connected to the return conduit inlet,
• wherein a first pressure in the supply chamber and a second pressure in the discharge chamber are held at a sub-atmospheric pressure level, and
• wherein the temperature conditioning system is arranged to provide a static pressure difference between the supply chamber outlet and the discharge chamber inlet to create a flow through the conditioning conduit.