Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device therefor

A non-transitory computer-readable storage medium that records a data computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer, the data, comprising:

• information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device,
• wherein the overlay measurement device comprises
• a light source,
• an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark,
• a detector that acquires an image of the first overlay mark and an image of the second overlay mark,
• a transceiver, and
• a processor electrically connected to the transceiver, and
• wherein the processor is configured to
• obtain the data transmitted from the user terminal through the transceiver,
• analyze the recipe included in the data,
• when the analysis of the recipe is completed, perform optimization process for measurement options of the wafer based on the recipe,
• measure the aperture in a first pinhole position,
• measure the aperture in a second pinhole position that is a predetermined distance apart from the first pinhole position once,
• calculate Tis 3 Sigma in the first pinhole position and the second pinhole position, and
• perform a pinhole optimization process of selecting a pinhole position from the first pinhole position and the second pinhole position where the Tis 3 Sigma is a minimum by modeling the Tis 3 Sigma in each pinhole position in relation to the aperture.