Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device therefor

A non-transitory computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer, the data, comprising:

• information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device,
• wherein the overlay measurement device comprises
• a light source,
• an objective lens that concentrates a beam from the light source on a measurement position of the wafer, and gathers the beam being reflected in the measurement position,
• a lens focus actuator that adjusts a distance between the objective lens and the wafer such that a focus surface is placed at the first overlay mark or the second overlay mark,
• an auto focus module that adjusts a focus by adjusting the lens focus actuator,
• a detector that acquires an image of the first overlay mark and an image of the second overlay mark,
• a transceiver, and
• a processor electrically connected to the transceiver, and
• wherein the processor is configured to
• obtain the data transmitted from the user terminal through the transceiver,
• analyze the recipe included in the data,
• when the analysis of the recipe is completed, perform optimization process for measurement options of the wafer based on the recipe,
• perform a focus scan at one site by controlling the auto focus module,
• determine a focus measurement area based on the performed focus scan,
• calculate statistical values for a plurality of parameters by moving the focus by one step within the determined focus measurement area for each site,
• apply a weight respectively to the calculated statistical values, and
• perform a focus optimization process of selecting a focus from the moved foci where a total of the statistical values to which the weight is applied respectively is a minimum value as a focus of the auto focus module.