Imprint apparatus, article manufacturing method, determination method, and recording medium

An imprint apparatus that performs an imprint process of forming a pattern on an imprint material supplied on a substrate by bringing the imprint material into contact with a mold, the imprint apparatus comprising:

• a holding unit configured to hold the substrate;
• a supply unit configured to supply a droplet of the imprint material to the substrate in a partial region, the partial region including an edge of the substrate and with which a part of a pattern region of the mold is to come into contact in the imprint process;
• and
• a mold deformation unit configured to deform the pattern region of the mold into a convex shape toward the substrate,
• wherein the holding unit includes a substrate deformation unit configured to deform a surface shape of the substrate in the partial region, and
• wherein, based on measurement data on a surface height of the substrate in the partial region in a state in which the holding unit holds the substrate, the substrate deformation unit deforms the surface shape of the substrate in the partial region in such a manner that contact between the imprint material and the mold is to be maintained when the mold in a deformed state by the mold deformation unit is restored after the mold in the deformed state has been brought into contact with the imprint material on the substrate.

A method of manufacturing an article, the method comprising:

• forming, by using an imprint apparatus, a pattern on an imprint material supplied on a substrate in a partial region, the partial region including an edge of the substrate and with which a part of a pattern region of a mold is to come into contact in an imprint process;
• and
• manufacturing the article by processing the substrate on which the pattern has been formed,
• wherein the imprint apparatus performs the imprint process of forming the pattern on the imprint material on the substrate by bringing the imprint material into contact with the mold, the imprint apparatus including
• a holding unit configured to hold the substrate,
• a supply unit configured to supply a droplet of the imprint material to the substrate in the partial region, and
• a control unit configured to determine a position or an amount of the droplet of the imprint material to be supplied to the partial region, based on measurement data on a surface height of the substrate in the partial region in a state in which the holding unit holds the substrate,
• wherein the supply unit supplies the droplet of the imprint material to the partial region, based on the determined position or the determined amount of the droplet of the imprint material, and
• wherein the imprint apparatus forms the pattern on the imprint material by bringing the imprint material supplied to the partial region into contact with the mold.

A method of manufacturing an article, the method comprising:

• forming, by using an imprint apparatus, a pattern on an imprint material supplied on a substrate in a partial region, the partial region including an edge of the substrate and with which a part of a pattern region of a mold is to come into contact in an imprint process;
• and
• manufacturing the article by processing the substrate on which the pattern has been formed,
• wherein the imprint apparatus performs the imprint process of forming the pattern on the imprint material on the substrate by bringing the imprint material into contact with the mold, the imprint apparatus including
• a holding unit configured to hold the substrate,
• a supply unit configured to supply a droplet of the imprint material to the substrate in the partial region, and
• a mold deformation unit configured to deform the pattern region of the mold into a convex shape toward the substrate,
• wherein the holding unit includes a substrate deformation unit configured to deform a surface shape of the substrate in the partial region, and
• wherein, based on measurement data on a surface height of the substrate in the partial region in a state in which the holding unit holds the substrate, the substrate deformation unit deforms the surface shape of the substrate in the partial region in such a manner that contact between the imprint material and the mold is to be maintained when the mold in a deformed state by the mold deformation unit is restored after the mold in the deformed state has been brought into contact with the imprint material on the substrate.