Optical Modulator And Laser Interferometer
AssigneeSeiko Epson Corporation
InventorsKohei YAMADA, Atsushi MATSUO
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AssigneeSeiko Epson Corporation
InventorsKohei YAMADA, Atsushi MATSUO
Estimating the term…
An optical modulator includes: a vibrator configured to perform flexural vibration along a first direction; and a diffraction grating disposed in the vibrator and having a plurality of grooves arranged in parallel along the first direction. A frequency of laser light incident on the diffraction grating is shifted. In addition, it is preferable that the vibrator includes a base portion, a first vibration arm, and a second vibration arm disposed side by side along the first direction and coupled to the base portion, the first vibration arm and the second vibration arm perform the flexural vibration along the first direction, and the diffraction grating is disposed on at least one of the first vibration arm and the second vibration arm.
An optical modulator comprising:
Dependencies are inferred from the claim text.