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US 2024/0175838 A1Published application
Halogenated gas sensor
AssigneeInficon GmbH
InventorGang GU
Life of this patent
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Abstract
Halogenated gas sensor for detecting halogenated gas, comprising at least a first metal electrode and a second metal electrode, which are connected with a sensing material, which comprises at least one of NaAlSiO4, KAlSiO4, RbAlSiO4, CSAlSiO4.
Claims15
A halogenated gas sensor for detecting halogenated gas, comprising at least a first metal electrode and a second metal electrode, which are connected with a sensing material, which comprises at least one of NaAlSiO4, KAlSiO4, RbAlSiO4, CSAlSiO4.
Dependencies are inferred from the claim text.