Substrate defect analysis

A non-transitory computer-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:

• identifying property data of a substrate processed by a substrate processing system;
• identifying, based on a first subset of the property data, a plurality of regions of the substrate corresponding to a first defect category;
• sub-categorizing, based on a second subset of the property data, the plurality of regions of the substrate corresponding to the first defect category into a plurality of defect sub-categories;
• and
• causing, based on one or more of the plurality of regions corresponding to at least one of the plurality of defect sub-categories, performance of a corrective action associated with the substrate processing system.

A system comprising:

• a memory;
• and
• a processing device coupled to the memory, the processing device to:
• identify property data of a substrate processed by a substrate processing system;
• identify, based on a first subset of the property data, a plurality of regions of the substrate corresponding to a first defect category;
• sub-categorize, based on a second subset of the property data, the plurality of regions of the substrate corresponding to the first defect category into a plurality of defect sub-categories;
• and
• cause, based on one or more of the plurality of regions corresponding to at least one of the plurality of defect sub-categories, performance of a corrective action associated with the substrate processing system.