Inspection device and inspection method

Abstract

Provided are an inspection device and an inspection method capable of controlling the positional relationship between a device and a measurement object to achieve an attitude enabling an appropriate detection of the surface conditions. The inspection device includes: a detector including a transmitter configured to transmit a transmission wave to a measurement object and a receiver configured to receive a return wave generated as a result of the transmission wave hitting the measurement object; and at least one sucker configured to suck the measurement object to regulate respective positions of the measurement object and the detector relative to each other.

Dependencies are inferred from the claim text.