Substrate processing baffle, substrate processing apparatus including the same, and processing apparatus fabrication method

A substrate processing apparatus, comprising:

• a dry chamber housing that provides a drying space;
• a substrate processing baffle in the dry chamber housing;
• and
• a coupling member that connects the dry chamber housing and the substrate processing baffle to each other,
• wherein the substrate processing baffle includes a plate body,
• wherein the plate body includes:
• a lower flow path connected to a bottom surface of the plate body;
• and
• a coupling hole extending through a top surface of the plate body,
• wherein the coupling hole includes a placement hole,
• wherein at least a portion of the placement hole is defined by an inclined inner surface inclined toward an axis of the placement hole, the axis extending vertically, and
• wherein a portion of a lateral surface of the coupling member is in contact with the inclined inner surface.

A substrate processing apparatus fabrication method, comprising:

• placing a substrate processing baffle below an upper chamber of a dry chamber housing;
• inserting a coupling member into the substrate processing baffle;
• and
• descending the substrate processing baffle to fix the coupling member to the substrate processing baffle,
• wherein the substrate processing baffle includes a plate body having a central axis that extends in a first direction,
• wherein the plate body includes:
• a lower flow path connected to a bottom surface of the plate body;
• and
• a coupling hole extending through a top surface of the plate body,
• wherein the coupling hole includes a placement hole,
• wherein the placement hole includes a position setting aperture whose width decreases with decreasing distance from the top surface of the plate body,
• wherein inserting the coupling member into the substrate processing baffle includes inserting the coupling member into the coupling hole, and
• wherein descending the substrate processing baffle includes fixing the coupling member into the placement hole.