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US 2024/0175134 A1Published application
Conductive cooling of a low temperature pedestal operating in a high temperature deposition sequence
AssigneeLam Research Corporation
InventorsGary B. LIND, Ravi VELLANKI, Jeff CLEVENGER, Vinayakarddy GULABAL
Life of this patent
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Abstract
A pedestal comprises a base portion, a stem portion, and a heater arranged in the base portion. The stem portion has a first end attached to a center region of the base portion. The heater includes a first loop arranged in the center region of the base portion. A first perimeter of the first loop is less than or equal to a second perimeter of the first end of the stem portion.
Claims20
A pedestal comprising:
- a base portion;
- a stem portion having a first end attached to a center region of the base portion;
- and
- a heater arranged in the base portion, the heater including a first loop arranged in the center region of the base portion, wherein a first perimeter of the first loop is less than or equal to a second perimeter of the first end of the stem portion.
1 more element
A pedestal comprising:
- a base portion including a heater having a first loop arranged at a center region of the base portion and including a second loop that surrounds the first loop;
- and
- a stem portion having a first end attached to the center region of the base portion;
- wherein a first perimeter of the first loop of the heater is less than or equal to a second perimeter of the first end of the stem portion;
- and
- wherein a third perimeter of the second loop is greater than the second perimeter of the first end of the stem portion and less than a fourth perimeter of the base portion.
3 more elements
Dependencies are inferred from the claim text.