Film forming apparatus and article manufacturing method

Abstract

A film forming apparatus forms, on a substrate, a film formed of a cured product of a curable composition. The apparatus includes a dispenser including an end face where a discharge outlet for discharging the curable composition is arranged, and a reference part having a lower end lower than the end face, and configured to discharge the curable composition downward from the discharge outlet so as to arrange the curable composition on the substrate, a sensor configured to detect the curable composition adhering to the end face, and a controller configured to evaluate a state of the curable composition adhering to the end face based on a result obtained by measuring the lower end using the sensor and a result obtained by measuring the end face using the sensor.

Dependencies are inferred from the claim text.