Electronic device with three-dimensional nanoprobe device
AssigneeSamsung Electronics Co., Ltd.
InventorsMikyung KIM, Kitae PARK, Jonghan KIM, Seong Joong KIM, Chisung BAE, Hyeokki HONG
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Abstract
A three-dimensional (3D) nanoprobe device includes a body portion including a plurality of body layers that are stacked, a plurality of nanoprobes respectively extending longitudinally from the body portion, with each of the plurality of nanoprobes comprising a plurality of extension layers that are stacked, and an electrode portion disposed on a portion of the body portion.
Claims20
A three-dimensional (3D) nanoprobe device comprising:
- a body portion comprising a plurality of body layers that are stacked;
- a plurality of nanoprobes respectively extending longitudinally from the body portion, with each of the plurality of nanoprobes comprising a plurality of extension layers that are stacked;
- and
- an electrode portion disposed on a portion of the body portion.
An electronic device comprising a three-dimensional (3D) nanoprobe device, the 3D nanoprobe comprising:
- a body portion in which a plurality of body layers is stacked;
- an extension portion extending longitudinally from the body portion and in which a plurality of extension layers having a plurality of nanoprobes is stacked;
- and
- an electrode portion disposed on a portion of the body portion.
A three-dimensional (3D) nanoprobe device comprising:
- a body portion comprising a plurality of layers;
- an extension portion extending from the plurality of layers of the body portion in a first direction to configure nanoprobes, wherein each of the nanoprobes is spaced apart from another in the first direction;
- and
- an electrode portion extending from the body portion in a second direction different from the first direction.
Dependencies are inferred from the claim text.