Drawing apparatus and drawing method

A drawing apparatus that draws at least one drawing pattern on an exposure surface of a substrate, said exposure surface being provided with at least one stepped structure including a step upper surface, a step lower surface having a lower height than said step upper surface, and an inclined surface connecting said step upper surface and said step lower surface to each other, said at least one drawing pattern including at least one stepped pattern drawn at least partially on said inclined surface of said stepped structure, and said at least one stepped pattern extending in a longitudinal direction in a plan view, said drawing apparatus comprising:

• a substrate holding mechanism that holds said substrate on a horizontal plane;
• a light source;
• a modulator that includes a diffraction grating including a plurality of diffractive elements arrayed in an array direction and modulates light from said light source;
• a projection optical system including an objective lens disposed between said exposure surface and said modulator;
• a rotation mechanism that rotates said substrate in said horizontal plane;
• and
• a controller that controls said rotation mechanism to adjust an orientation of said substrate on said horizontal plane in such a manner that said longitudinal direction of said at least one stepped pattern substantially coincides with an orthogonal direction orthogonal to said array direction of said diffraction grating in the plan view.