Fluidic baffle for high pressure fluid distribution and substrate processing apparatus

A substrate processing apparatus, comprising:

• a chamber including an upper chamber and a lower chamber that are engageable with each other and provide a space for processing a substrate;
• a substrate support configured to support the substrate in the chamber;
• an upper supply port provided in the upper chamber and configured to supply a supercritical fluid on an upper surface of the substrate in the chamber;
• a recess provided in an lower surface of the upper chamber, the recess having a diffuser shape whose diameter gradually increases from an outlet of the upper supply port;
• and
• a fluidic baffle disposed in the recess between the upper supply port and the substrate, the fluidic baffle having a three-dimensional curved structure where an interior is divided into two subspaces twisted with each other by an interface and having triperiodic minimum curved surface (TPMS).

A substrate processing apparatus, comprising:

• a chamber including an upper chamber and a lower chamber that are engageable with each other and provide a space for processing a substrate;
• a substrate support configured to support the substrate in the chamber;
• an upper supply port provided in the upper chamber and configured to supply a supercritical fluid on an upper surface of the substrate in the chamber;
• an exhaust port provided in a lower portion of the chamber and configured to exhaust the fluid in the chamber;
• a lower supply port provided in the lower portion of the chamber as adjacent to the exhaust port and configured to supply a supercritical fluid into the chamber;
• a recess provided in an lower surface of the upper chamber and having a diffuser shape whose diameter gradually increases from an outlet of the upper supply port;
• a fluidic baffle disposed in the recess between the upper supply port and the substrate, the fluidic baffle including unit cells repeatedly arranged in a space and in fluid communication with each other,
• wherein each of the unit cells includes,
• upper holes disposed in a first plane and which the fluid enters;
• lower holes disposed in a second plane parallel with the first plane and spaced apart from the first plane along a vertical direction;
• an crossover passage hole disposed between the first plane and the second plane;
• and
• branch passages extending along oblique directions between the first plane and the second plane, the branch passages including upper branch passages communicating the upper holes with the crossover passage hole, respectively and lower branch passages communicating the crossover passage hole with the lower holes, respectively.