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US 2024/0167150 A1Published application
Power polishing apparatuses and methods for in-situ finishing and coating of optical component
AssigneeEdmund Optics, Inc.
InventorsJoel Bagwell, Nathan Carlie
Life of this patent
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Abstract
A finishing and coating apparatus combines finishing and coating optical components into one vacuum apparatus. The apparatus includes a vacuum system, a substrate holder, a finisher including a laser engine and a beam delivery apparatus, and a coating source. The finisher is configured to finish the optical components prior to coating the optical components. The finisher includes a laser engine and a laser beam delivery apparatus configured to direct a beam from the laser engine toward each of the optical components.
Claims20
A finishing and coating apparatus comprising:
- a housing defining a chamber;
- a substrate holder within the chamber that holds one or more optical components;
- a vacuum pump system that creates a vacuum within the chamber;
- a finisher comprising:
- a laser engine;
- and
- a laser beam delivery apparatus that directs a beam from the laser engine toward the one or more optical components held by the substrate holder, and includes a stationary portion mounted to the laser engine and an extendable portion that is moveable within the stationary portion and the chamber while under vacuum to translate along a longitudinal axis of the stationary portion from a retracted position to an extended position such that the beam scans along a radius of the substrate holder;
- and
- a coating source providing a coating to the one or more optical components;
- wherein the finisher is configured to finish the one or more optical components by melting an irradiated surface of the one or more optical components.
7 more elements
A finishing and coating apparatus comprising:
- a vacuum chamber;
- a substrate holder within the vacuum chamber to hold one or more optical components;
- and
- a finisher including a laser engine and a beam delivery apparatus configured to direct the laser at the one or more optical components and condition a laser beam shape and energy distribution to finish surfaces of the one or more optical components by heating the surfaces of the one or more optical components under vacuum, allowing surface material to flow to fill imperfections in the surface.
1 more element
Dependencies are inferred from the claim text.