Exposure head, calibration system, and drawing device

A calibration system for calibrating an intensity of an exposure beam that is emitted from an exposure head and irradiated onto a substrate conveyed in a predetermined direction while the exposure beam is scanned in a one-dimensional manner, the exposure head including:

• a polygon mirror that has multiple reflecting surfaces and is provided in a rotatable manner;
• an optical element that is configured to cause the beam emitted from a light source and shaped into a beam shape to enter the polygon mirror;
• and an imaging optical system that is configured to image the beam reflected by the polygon mirror onto an exposure surface of the substrate, comprising:
• a reflecting mirror that is provided, in the exposure head, insertably into or removably from an optical path of the beam shaped into the beam shape entering the optical element, the reflecting mirror being configured to reflect the beam in a direction different from the optical path while being inserted into the optical path;
• a light-receiving element that is arranged, in the exposure head, at a position where the beam reflected by the reflecting mirror can enter the light-receiving element, and that is capable detecting an intensity of the beam;
• a control part that is configured to generate data representing the intensity of the beam based on a detection signal output from the light-receiving element;
• and
• a storage part that is configured to store the data as calibration data.

A drawing device, comprising:

• a calibration system for calibrating an intensity of an exposure beam that is emitted from an exposure head and irradiated onto a substrate conveyed in a predetermined direction while the exposure beam is scanned in a one-dimensional manner;
• and
• conveying means that is configured to convey the substrate,
• wherein the exposure head includes:
• a polygon mirror that has multiple reflecting surfaces and is provided in a rotatable manner;
• an optical element that is configured to cause the beam emitted from a light source and shaped into a beam shape to enter the polygon mirror;
• and an imaging optical system that is configured to image the beam reflected by the polygon mirror onto an exposure surface of the substrate,
• wherein the calibration system includes:
• a reflecting mirror that is provided, in the exposure head, insertably into or removably from an optical path of the beam shaped into the beam shape entering the optical element, the reflecting mirror being configured to reflect the beam in a direction different from the optical path while being inserted into the optical path;
• a light-receiving element that is arranged, in the exposure head, at a position where the beam reflected by the reflecting mirror can enter the light-receiving element, and that is capable of detecting an intensity of the beam;
• a control part that is configured to generate data representing the intensity of the beam based on a detection signal output from the light-receiving element;
• and
• a storage part that is configured to store the data as calibration data, and
• wherein the exposure head is arranged such that the beam is scanned in a direction orthogonal to the direction in which the substrate is conveyed.