Multi-wavelength vcsel array and method of fabrication

Abstract

A vertical cavity surface emitting laser (VCSEL) array fabricated to produce multiple wavelengths. A first distributed Bragg reflector (DBR) is formed on a substrate, and an optical cavity having an active region and a cavity layer is formed on the first DBR, and a second DBR is formed on the optical cavity. The cavity layer is selectively etched to form wavelength-specific regions having different filling factors. As a result, the wavelength-specific regions have different optical thicknesses (e.g., different refractive indexes and/or physical thicknesses) and generate different Fabry Perot wavelengths.

Dependencies are inferred from the claim text.