System for the Simultaneous Monitoring of Constituents of an Electroplating Bath
AssigneeTechnic, Inc.
InventorsKazimierz Wikiel, Aleksander Jaworski, Tomasz Rapecki
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Abstract
Methods of and apparatuses for monitoring a plating bath composition by using complex designer voltammetry. The designer waveforms are optimized in order to maximize analytical output of the solitary measurement thus drastically reducing the total time required for a full analysis of a plating bath compared to traditional analytical techniques.
Claims26
A system designed to monitor concentrations of constituents of a plating bath during an electrometallization process, the system comprising:
- (a) a comprehensive electrochemical controller designed to generate one or more electrochemical waveforms;
- (b) an electrochemical 3-electrode sensor having an inner compartment;
- (c) a plating solution that fills the inner compartment of the sensor creating a plating bath;
- (d) one or more electrochemical waveforms generated by the controller, wherein the electrochemical waveforms are applied to the sensor;
- (e) an electrochemical response from the sensor, wherein said electrochemical response is subjected to a F-factor analysis that fragmentizes the electrochemical waveforms;
- (f) the fragments of the electrochemical waveforms with high F-ratio, wherein the fragments of the electrochemical waveforms are used to build one or more consolidated designer waveforms;
- and
- (g) a calibration building model created using one or more consolidated waveforms, wherein the calibration model predicts unknown concentrations of one or more constituents of a plating bath.
The system according to claim 13, wherein the electroplating bath comprises one or more of the metals selected from the group consisting of Cu, Sn, Pb, Ni, Zn, Ag, Au, Cd, Co, Cr, Rh, Ru, Pd, In, Bi, and their alloys.
The system according to claim 22, wherein the multivariate chemometric techniques are Principal Component Regression (PCR) and Partial Least Squares (PLS).
Dependencies are inferred from the claim text.