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US 2024/0113693 A1Published application
Reconfigurable acoustic wave resonators and filters
OwnerMilad Zolfagharloo Koohi, Gernot Fattingerinventors
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Abstract
Reconfigurable bulk acoustic wave (BAW) devices include one or more ferroelectric materials as the transduction layer(s). A polarization state of at least one of the ferroelectric material(s) is adjusted by applying a bias voltage across electrodes of the BAW device. The application of the bias voltage can change one or more properties of the ferroelectric material, which in turn may change a response of the BAW device.
Claims20
A reconfigurable bulk acoustic wave (BAW) device, comprising:
- a first reconfigurable BAW resonator;
- and
- a second reconfigurable BAW resonator stacked vertically over or under the first reconfigurable BAW resonator, wherein the first reconfigurable BAW resonator and the second reconfigurable BAW resonator each include:
- a first electrode;
- a second electrode;
- and
- a ferroelectric layer between the first electrode and the second electrode.
4 more elements
A reconfigurable transducer, comprising:
- a first reconfigurable transducer stacked vertically over a second reconfigurable transducer;
- and
- an intermediate electrode between the first reconfigurable transducer and the second reconfigurable transducer, wherein:
- the first reconfigurable transducer comprises:
- a first electrode;
- a first ferroelectric layer between the first electrode and the intermediate electrode;
- and
- the second reconfigurable transducer comprises a second ferroelectric layer between the intermediate electrode and a second electrode.
5 more elements
A reconfigurable filter, comprising:
- a first reconfigurable BAW resonator;
- a second reconfigurable BAW resonator stacked vertically over or under the first reconfigurable BAW resonator, and a coupling structure comprising one or more coupling layers between the first reconfigurable BAW resonator and the second reconfigurable BAW resonator, wherein the first reconfigurable BAW resonator and the second reconfigurable BAW resonator each includes:
- a first electrode;
- a second electrode;
- and
- a ferroelectric layer between the first electrode and the second electrode;
- and
- a reflector between the second reconfigurable BAW resonator and a substrate.
5 more elements
Dependencies are inferred from the claim text.