Sensing device and method of manufacturing sensing device

Abstract

A sensing device including a substrate, a circuit layer, and a plurality of sensing units is provided. The circuit layer is disposed on the substrate and includes a plurality of driving circuits. The plurality of sensing units are disposed on the circuit layer, and each of the sensing units includes a supporting part and a sensing part. The supporting part is electrically connected to one of the plurality of driving circuits. The sensing part is electrically connected to the supporting part, and the sensing part is separated from a first cavity by the supporting part and the circuit layer. In a normal direction of the substrate, at least a portion of the supporting part is disposed between the circuit layer and the sensing part.

Dependencies are inferred from the claim text.