Bonded body, substrate, method for producing bonded body, and method for producing substrate
AssigneesThe University of Tokyo, Daikin Industries, Ltd.
InventorsKeisuke NAGATO, Kota AONO, Yusuke EBIHARA, Masayuki NAKAO, Yuki UEDA, Shingo OKUNO, Hirokazu KOMORI, Akiyoshi YAMAUCHI, Yosuke KISHIKAWA
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