Manufacturing Apparatus of Optical Circuit and Manufacturing Method of Optical Circuit
AssigneeNippon Telegraph and Telephone Corporation
InventorsKenya Suzuki, Keita Yamaguchi, Ai Yanagihara, Masashi Ota
Life of this patent
Estimating the term…
Loading patent…
AssigneeNippon Telegraph and Telephone Corporation
InventorsKenya Suzuki, Keita Yamaguchi, Ai Yanagihara, Masashi Ota
Estimating the term…
An optical circuit to be manufactured on a wafer has a problem that characteristics are distributed (biased) in a wafer plane due to various causes in manufacturing. The present invention is characterized in that refractive index distribution of an upper cladding is adjusted on the basis of refractive index distribution of a lower cladding and a core film, a film thickness of the core film, and in-plane distribution such as an execution refractive index of an optical waveguide (calculated from a width of a core pattern).
An apparatus for manufacturing an optical circuit including a glass film, the apparatus comprising:
A method for manufacturing an optical circuit including a glass film, the method comprising:
Dependencies are inferred from the claim text.