Acceleration sensor
AssigneeRohm Co., Ltd.
InventorHiroki MIYABUCHI
Life of this patent
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AssigneeRohm Co., Ltd.
InventorHiroki MIYABUCHI
Estimating the term…
An acceleration detecting portion that detects an acceleration in a predetermined direction and an offset detecting portion that detects an offset amount with respect to the acceleration detecting portion are included. The offset detecting portion includes a second semiconductor substrate with a second cavity formed in its interior, a second fixed structure including a second fixed electrode that is supported, in a state of floating with respect to the second cavity, by the second semiconductor substrate, a second movable structure including a second movable electrode that is supported, in a state of floating with respect to the second cavity, by the second semiconductor substrate, and a disabling structure that disables a function of the second movable electrode displacing with respect to the second fixed electrode.
An acceleration sensor comprising:
Dependencies are inferred from the claim text.