Detector and method for obtaining kikuchi images
AssigneeBruker Nano, Inc.
InventorUwe ROSSEK
Life of this patent
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Abstract
The present invention refers to a detector and a method for obtaining Kikuchi images by using electron backscatter diffraction (EBSD) or transmission Kikuchi diffraction (TKD) technique. In particular, the present invention refers to a detector comprising a detector body, a detector head with a scintillation screen and a photodetector with a active surface for detecting Kikuchi patterns, and means configured to move the detector head with respect to the detector body. The method comprises obtaining a first and a second Kikuchi pattern, and moving the detector head after obtaining the first Kikuchi pattern and prior obtaining the second Kikuchi pattern.
Claims15
Detector (30, 31) for Kikuchi diffraction, the detector (30, 31) comprising:
- a detector body (40);
- a detector head (50) configured to detect incident backscattered electrons (19);
- means (60, 61) configured to move the detector head (50) with respect to the detector body (40);
- and
- a control unit (43) which is communicatively connected to the means.
Method for determining a Kikuchi image, the method comprising
- irradiating a sample (14) with an electron beam (13);
- obtaining a first Kikuchi image comprising detecting electrons diffracted by the sample (14) which lead to the formation of a first Kikuchi pattern on an active surface (53);
- moving the active surface (53);
- obtaining a second Kikuchi image comprising detecting electrons diffracted by the sample (14) which lead to the formation of a second Kikuchi pattern on the active surface (53);
- and
- determining a third Kikuchi image from the first Kikuchi image and the second Kikuchi image.
Use of a detector (30, 31) for determining a Kikuchi image, wherein the detector (30, 31) comprises a detector body (40), a detector head (50) configured to detect incident backscattered electrons (19), (52) and means (60, 61) configured to move the detector head (50) with respect to the detector body (40).
Dependencies are inferred from the claim text.