Silica glass porous body and manufacturing method therefor
AssigneeAGC Inc.
InventorKazuya SASAKI
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Abstract
An object of the present invention is to provide a technique capable of obtaining a shower plate having cleaning resistance without machining. The present invention relates to a silica glass porous body having a plurality of pores, in which the plurality of pores includes a non-communication pore and a communication pore, and the pores have an average pore size, obtained by mercury intrusion porosimetry, of 10 μm to 150 μm.
Claims7
A silica glass porous body, comprising:
- a plurality of pores, wherein
- the plurality of pores includes a non-communication pore and a communication pore, and
- the pores has an average pore size, obtained by mercury intrusion porosimetry, of 10 μm to 150 μm.
A method for producing a silica glass porous body having a plurality of pores, in which the plurality of pores includes a non-communication pore and a communication pore, and the pores have an average pore size, obtained by mercury intrusion porosimetry, of 10 μm to 150 μm, the method comprising:
- depositing silica particles generated by flame hydrolysis of a silicon compound to obtain a soot body;
- densifying the soot body in an inert gas atmosphere to obtain a silica glass dense body;
- and
- making the silica glass dense body porous under a condition of at least a lower pressure or a higher temperature than that when the silica glass dense body is obtained.
Dependencies are inferred from the claim text.