Silica glass member and method for producing same
AssigneeAGC Inc.
InventorKazuya SASAKI
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Abstract
The present invention relates to a silica glass member having a plurality of pores, in which some or all of the plurality of pores are communication pores, and S/S0 is 1.5 or more. S: surface area obtained by a BET method for a 40 mm×8 mm×0.5 mm sample cut from the silica glass member; and S0: geometric surface area obtained based on external dimensions of the sample.
Claims10
A silica glass member comprising:
- a plurality of pores, wherein
- some or all of the plurality of pores are communication pores, and
- S/S0 is 1.5 or more,
- S:
- surface area obtained by a BET method for a 40 mm×8 mm×0.5 mm sample cut from the silica glass member;
- and
- S0:
- geometric surface area obtained based on external dimensions of the sample.
A method for manufacturing a silica glass member having a plurality of pores, in which some or all of the plurality of pores are communication pores, and S/S0 is 1.5 or more where S represents a surface area obtained by a BET method for a 40 mm×8 mm×0.5 mm sample cut from the silica glass member, and S0 represents a geometric surface area obtained based on external dimensions of the sample, the method comprising:
- depositing silica particles generated by flame hydrolysis of a silicon compound to obtain a soot body;
- densifying the soot body in an inert gas atmosphere to obtain a silica glass dense body;
- making the silica glass dense body porous under a condition of at least a lower pressure or a higher temperature than that when the silica glass dense body is obtained, to obtain a silica glass porous body;
- and
- processing the silica glass porous body to obtain the silica glass member having an arbitrary shape.
Dependencies are inferred from the claim text.