Method and Apparatus for Plasma Processing
AssigneeHaydale Graphene Industries PLC
InventorsJohn-Mark Seymour, Thomas Howe
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Abstract
The present invention relates to a method for treating a sample using glow-discharge plasma comprising one or more treatment steps, in which the sample for treatment is subject to plasma treatment in a treatment vessel provided with a temperature control system, wherein during the one or more treatment steps the treatment vessel is rotated about an axis in order to agitate the sample and the temperature control system is used to cool or heat the sample. The present invention also relates to an apparatus for use in such a method.
Claims26
A method for treating a sample using glow-discharge plasma comprising one or more treatment steps, in which the sample for treatment is subject to plasma treatment in apparatus comprising a treatment vessel provided with a temperature control system,
- wherein during the one or more treatment steps the treatment vessel is rotated about an axis in order to agitate the sample and the temperature control system is used to cool or heat the sample.
Dependencies are inferred from the claim text.