Low noise piezoelectric sensors
AssigneeQUALCOMM Technologies, Inc.
InventorsRobert John LITTRELL, Craig CORE
Life of this patent
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Abstract
A low noise piezoelectric sensor, such as a piezoelectric acoustic transducer, includes a first conductive layer, a second conductive layer, and a piezoelectric layer between the first conductive layer and the second conductive layer. The piezoelectric layer comprises aluminum scandium nitride (AlScN) having a scandium content of greater than 15%, in which the scandium content and an aluminum content comprises 100% of the aluminum scandium nitride. In this way, the piezoelectric layer (or the sensor including the piezoelectric layer) achieves a dissipation factor of less than about 0.1%.
Claims30
A device, comprising:
- a first conductive layer;
- a second conductive layer;
- and
- a piezoelectric layer between the first conductive layer and the second conductive layer, the piezoelectric layer comprising a dissipation factor of less than about 0.1%.
A device, comprising:
- a first conductive layer;
- a second conductive layer;
- and
- a piezoelectric layer between the first conductive layer and the second conductive layer, the piezoelectric layer comprising aluminum scandium nitride having a scandium content of greater than 15%, wherein the scandium content and an aluminum content comprises 100% of the aluminum scandium nitride.
A method of fabricating a device, comprising:
- depositing a first conductive layer on a substrate;
- depositing a piezoelectric layer on the first conductive layer, the piezoelectric layer comprising aluminum scandium nitride having a scandium content of greater than 15%, wherein the scandium content and an aluminum content comprises 100% of the aluminum scandium nitride;
- and
- depositing a second conductive layer on the piezoelectric layer.
Dependencies are inferred from the claim text.