US 2023/0420611 A1 · LIGHT-EMITTING DEVICE AND MANUFACTURING METHOD FOR MAKING THE SAME

Abstract

A light-emitting device includes a patterned substrate, a buffer layer, an epitaxial layered unit, and at least one hole structure. The patterned substrate includes a supporting substrate having an upper surface, and a plurality of protrusions formed on the upper surface. Each of the protrusions includes a base and a cone sequentially stacked in such order on the upper surface. The cone is made of a material different from that of the supporting substrate. The buffer layer formed on a side wall surface of each of the protrusions and the upper surface of the supporting substrate exposed from the protrusions. The epitaxial layered unit is formed on the buffer layer opposite to the patterned substrate. The hole structure is disposed above a top end of at least one of the protrusions. A method for manufacturing the light-emitting device is also disclosed.

Claims20

Dependent claims

A light-emitting device, comprising:

a patterned substrate that includes a supporting substrate having an upper surface, and a plurality of protrusions formed on said upper surface of said supporting substrate, each of said protrusions having a top end, and including a base and a cone sequentially stacked in such order on said upper surface of said supporting substrate, said cone being made of a material different from that of said supporting substrate;
a buffer layer that is formed on a side wall surface of each of said protrusions and said upper surface of said supporting substrate exposed from said protrusions;
an epitaxial layered unit that is formed on said buffer layer opposite to said patterned substrate;
and
at least one hole structure that is disposed above said top end of at least one of said protrusions, said at least one hole structure being located above a top of said cone of said at least one of said protrusions and extending into said epitaxial layered unit.

2 more elements

A method for manufacturing a light-emitting device, comprising the steps of:

S1) forming a dielectric layer on a supporting layer;
S2) removing a part of the dielectric layer and a part of an upper region of the supporting layer by etching so as to form the supporting layer and the dielectric layer into a patterned substrate that has a supporting substrate and a plurality of protrusions formed on the supporting substrate, each of the protrusions having a top end and including a base and a cone sequentially stacked in such order on an upper surface of the supporting substrate, said cone being made of a material different from that of said supporting substrate;
S3) forming a buffer layer on a side wall surface of each of said protrusions and the upper surface of the supporting substrate exposed from the protrusions;
and
S4) forming an epitaxial layered unit on the buffer layer, at least one hole structure being formed above the top end of at least one of the protrusions during forming of the epitaxial layered unit.

2 more elements

Dependencies are inferred from the claim text.

Light-emitting device and manufacturing method for making the same

Life of this patent

Light-emitting device and manufacturing method for making the same

Life of this patent

Abstract

Claims20