Ferroelectric Film with Buffer Layers for Improved Reliability of Metal-Insulator-Metal Capacitor

A capacitor, comprising:

• a first electrode;
• a second electrode;
• and
• multiple dielectric layers present in between the first electrode and the second electrode, the multiple dielectric layers comprising a first buffer layer disposed on the first electrode, a ferroelectric film disposed on the first buffer layer, and a second buffer layer disposed on the ferroelectric film, wherein the first buffer layer and the second buffer layer each comprises Al2O3, and wherein the ferroelectric film comprises both HfO2 and ZrO2.

A capacitor, comprising:

• a first electrode;
• a second electrode;
• and
• multiple dielectric layers present in between the first electrode and the second electrode, the multiple dielectric layers comprising a first buffer layer disposed on the first electrode, a ferroelectric film disposed on the first buffer layer, and a second buffer layer disposed on the ferroelectric film, wherein the first buffer layer and the second buffer layer each comprises Al2O3, and wherein the ferroelectric film comprises HfO2 and ZrO2 present in multiple layers.

A capacitor device, comprising:

• a first capacitor;
• and
• a second capacitor stacked on top of the first capacitor,
• wherein the first capacitor and the second capacitor each comprises a first electrode, a second electrode, and multiple dielectric layers present in between the first electrode and the second electrode, wherein the second electrode of the first capacitor is shared with the first electrode of the second capacitor, wherein the multiple dielectric layers comprise a first buffer layer disposed on the first electrode, a ferroelectric film disposed on the first buffer layer, and a second buffer layer disposed on the ferroelectric film, and wherein the ferroelectric film comprises a combination of at least a first dielectric material and a second dielectric material having a higher dielectric constant κ value than either the first buffer layer or the second buffer layer.