Compact arrays of color-tunable pixels

A method of manufacturing an LED array, the method comprising:

• sequentially forming at least three p-n junctions on an epitaxial wafer to form an epitaxial stack, the epitaxial stack comprising at least one n-type layer and at least one p-type layer and having a color active region embedded between the at least one n-type layer and at least one p-type layer;
• depositing a reflective p-contact electrode on the epitaxial stack;
• bonding the reflective p-contact electrode to a backplane wafer;
• dry etching the epitaxial stack to access the at least one n-type layer to form electrical contacts and a mesa;
• conformally depositing a dielectric layer over the mesa;
• removing a portion of the dielectric layer to form a dielectric opening on a top surface of the mesa, the dielectric opening exposing the at least one n-type layer;
• depositing Ohmic contacts in the dielectric opening to form an electrical contact;
• depositing a conformal metal layer over a portion of the mesa and forming a gap across a center of the mesa to allow light out;
• and
• depositing an electrode grid over a top of the LED array.