Recipe proposal device and recipe proposal method
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsAkihiro ITOU, Hiroshi SHIROUZU, Atsushi HARIKAI
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Abstract
Disclosed is a recipe proposal device 10 including: an input section 11 for inputting a target information regarding a target shape of a substrate to be processed in a substrate processing apparatus; a recipe proposal section 12 that proposes a process recipe used in the substrate processing apparatus in order to form the target shape, based on the target information; a calculation section 13 that calculates a prediction information regarding a predicted shape when the substrate is processed in the substrate processing apparatus using the process recipe; and a display section 14 that displays the target information and the prediction information.
Claims16
A recipe proposal device, comprising:
- an input section for inputting a target information regarding a target shape of a substrate to be processed in a substrate processing apparatus;
- a recipe proposal section that proposes a process recipe used in the substrate processing apparatus in order to form the target shape, based on the target information;
- a calculation section that calculates a prediction information regarding a predicted shape when the substrate is processed in the substrate processing apparatus using the process recipe;
- and
- a display section that displays the target information and the prediction information.
A recipe proposal method for proposing a recipe using a recipe proposal device, the method comprising:
- a first step in which an input section receives an input of a target information regarding a target shape of a substrate to be processed in a substrate processing apparatus;
- a second step in which a recipe proposal section proposes a process recipe used in the substrate processing apparatus in order to form the target shape, based on the target information;
- a third step in which a calculation section calculates a prediction information regarding a predicted shape when the substrate is processed in the substrate processing apparatus using the process recipe;
- and
- a fourth step in which a display section displays the target information and the prediction information.
Dependencies are inferred from the claim text.