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AssigneeInchfab, Inc.
InventorsMitchell David Hsing, Parker Andrew Gould
Estimating the term…
Described herein are integrated benchtop semiconductor process cells and cell-based semiconductor fabs. A cell includes a tool compartment in which one or more semiconductor process tools are positioned. Each process tool is modular and assembled from units that define the tool configuration and functionality. The cell also comprises one or more support modules fluidically coupled to the semiconductor process tools and external connections. As such, a cell can be operable as a standalone unit with minimal external connections, it can be integrated with one or more additional cells to form a cell-based semiconductor fab. A cell can have a minimal footprint (e.g., less than 2-3 square meters) while supporting one or more tools (e.g., four different tools). As such, an entire semiconductor fab can be formed with minimal facility requirements (e.g., space, power) to produce low-volume devices. Also provided are semiconductor tool libraries for such purposes.
An integrated benchtop semiconductor process cell for processing a semiconductor substrate, the integrated benchtop semiconductor process cell comprising:
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19-21. (canceled)
A cell-based semiconductor fab comprising:
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A method of building a semiconductor fabrication line comprising semiconductor process tools and using a semiconductor tool library, the method comprising:
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Dependencies are inferred from the claim text.