Back to results
US 2023/0420272 A1Published application
Gas purge unit and the load port device
AssigneeTDK Corporation
InventorsTatsuhiro KOTSUGAI, Jun EMOTO, Takuya KUDO
Life of this patent
Estimating the term…
Abstract
A gas purge unit including: a first purge nozzle in which a gas flow path is internally formed, which communicates with a first purge port at the bottom of a container, and which introduces gas into the container or discharges gas from the container; a first communication unit which has a first holding unit for holding the first purge nozzle at one end; and a first actuator to which the first communication unit is connected and which moves the first communication unit and the first purge nozzle vertically.
Claims8
A gas purge unit comprising:
- a first purge nozzle including a gas passage formed therein and being capable of communicating with a first purge port provided at a bottom of a container so as to introduce gas into the container or discharge gas from the container;
- a first connection portion including a first holding portion for holding the first purge nozzle at one end of the first connection portion;
- and
- a first actuator connected with the first connection portion so as to vertically move the first connection portion and the first purge nozzle.
1 more element
Dependencies are inferred from the claim text.