Wafer placement table

A wafer placement table comprising:

• an upper substrate including a ceramic substrate that incorporates an electrode and having a wafer placement surface at an upper surface of the ceramic substrate;
• a lower substrate disposed on a surface of the upper substrate opposite to the wafer placement surface, and including a refrigerant flow path through which a refrigerant flows or a refrigerant flow-path groove constituting a side wall and a bottom of the refrigerant flow path;
• a through hole extending through the lower substrate in an up-down direction to intersect with the refrigerant flow path or the refrigerant flow-path groove;
• a screw hole provided, in a lower surface of the upper substrate, at a position facing the through hole;
• a screw member inserted from a lower surface of the lower substrate into the through hole and screwed into the screw hole;
• and
• a refrigerant-leakage prevention member that prevents the refrigerant from leaking out to the lower surface of the lower substrate through the through hole into which the screw member is inserted.