US 2023/0420216 A1 · COMBINED LASER AND BROAD ION BEAM (BIB) SYSTEMS FOR MORE EFFICIENT PROCESSING OF MULTIPLE SAMPLES

Abstract

Systems and methods for operating a combined laser and broad ion beam (BIB) polisher in a sample preparation workflow, are disclosed. An example method for operating a combined laser and broad ion beam (BIB) polisher according to the present invention comprises positioning a sample within the interior volume of the combined BIB and laser sample preparation system, causing a laser source component of the combined BIB and laser sample preparation system to emit an optical beam towards the sample, and causing a BIB source component of the combined BIB and laser sample preparation system to emit a broad ion beam towards the sample. The optical beam and the broad ion beam are each configured to cause a first portion and a second portion of the sample upon which it is incident to be removed, respectively.

Claims20

Dependent claims

A method for preparing a sample with a combined broad ion beam (BIB) and laser sample preparation system, the method including the steps:

positioning a sample within the interior volume of the combined BIB and laser sample preparation system;
causing a laser source component of the combined BIB and laser sample preparation system to emit an optical beam towards the sample, wherein the optical beam causes a first portion of the sample upon which it is incident to be removed;
and
causing a BIB source component of the combined BIB and laser sample preparation system to emit a broad ion beam towards the sample, wherein the broad ion beam causes a second portion of the sample upon which it is incident to be removed to reveal a region of interest.

1 more element

A combined broad ion beam (BIB) and laser sample preparation system having improved polishing throughput, the combined sample preparation system comprising:

a housing defining an interior volume;
a sample stage positioned within the interior volume, wherein the sample stage is configured to hold a sample holder during polishing of a sample held by the sample holder;
a laser source configured to emit an optical beam towards the sample when in use, wherein the optical beam causes a first portion of the sample upon which it is incident to be removed;
and
a BIB source configured to emit a broad ion beam towards the sample when in use, wherein the broad ion beam causes a second portion of the sample upon which it is incident to be removed to reveal a region of interest.

2 more elements

Dependencies are inferred from the claim text.

Combined laser and broad ion beam (bib) systems for more efficient processing of multiple samples

Life of this patent

Combined laser and broad ion beam (bib) systems for more efficient processing of multiple samples

Life of this patent

Abstract

Claims20