Substrate processing apparatus, substrate processing system, and substrate processing method

A substrate processing method using a substrate processing apparatus which comprises one or more processing units each performing a processing on a substrate and one or more arithmetic processing parts, comprising the steps of:

• (a) in which one or more storage parts store a plurality of processing recipes each defining a processing condition relating to a processing to be performed on a substrate in said one or more processing units;
• (b) in which said one or more arithmetic processing parts receive two or more pieces of identifying information identifying two or more processing recipes respectively from a management apparatus connected to said substrate processing apparatus so as to be capable of transmitting and receiving data, and based on said two or more pieces of identifying information, generate a flow recipe defining a flow of a series of processings for a substrate by combining said two or more processing recipes among said plurality of processing recipes stored in said one or more storage parts in said step (a);
• (c) in which said one or more processing units perform a processing in accordance with said flow recipe generated in said step (b),
• wherein
• said plurality of processing recipes include a plurality of liquid processing recipes each defining a condition of a processing to be performed on a substrate by using a processing liquid,
• said plurality of processing recipes include a plurality of measurement processing recipes each defining a condition of a measurement processing performed by one or more sensor parts each for acquiring a signal relating to an index on a state of a substrate processing in said one or more processing units, and
• in said step (b), said one or more arithmetic processing parts generate said flow recipe by combining one or more liquid processing recipes among said plurality of liquid processing recipes and one or more measurement processing recipes among said plurality of measurement processing recipes.