Foil trap cover device and debris reduction apparatus

A foil trap cover device configured to surround an outer peripheral portion of a rotary foil trap and collect debris scattered from the rotary foil trap, the rotary foil trap arranged near a plasma generated by a plasma generating unit, the rotary foil trap having a plurality of rotatable foils and configured to allow light emitted from the plasma to pass through the rotary foil trap and configured to capture debris generated from the plasma,

• the foil trap cover device comprising:
• a cover body configured to surround the outer peripheral portion of the rotary foil trap, the cover body having a first surface, which faces the foils, and a second surface, which is opposite to the first surface and faces the plasma;
• a cover heating unit provided on at least a portion of the second surface of the cover body and configured to heat the cover body;
• and
• a heating unit protecting member configured to cover the cover heating unit.