Debris mitigation device and light source apparatus including the same

A light source apparatus comprising a debris mitigation device that captures debris released from plasma, the debris mitigation device including:

• a plasma generation chamber in which a raw material that is to emit light is made to be excited to generate the plasma;
• a light extraction section in which light that has been emitted from the plasma is extracted;
• and
• a static foil trap disposed between the plasma generation chamber and the light extraction section and,
• the static foil trap including:
• an enclosure section including an incident opening through which light emitted from the plasma enters, an emission opening through which the light that has entered through the incident opening is emitted, and an internal space in which the light travels;
• a plurality of foils being fixed in an area of the internal space in which the light travels;
• an inlet hole being configured to be communicated with the internal space in the enclosure section and allowing a transparent gas transparent to the light to flow into the internal space;
• and
• a pressure-increasing mechanism including at least one of an incident-side member disposed at the incident opening in a manner that an opening area of the incident opening is reduced without blocking a traveling of the light, and an emission-side member disposed at the emission opening in a manner that an opening area of the emission opening is reduced without blocking the traveling of the light;
• the pressure-increasing mechanism increasing a pressure of the internal space.