Euv reticle stocker and method of operating the same

A method of operating an EUV reticle stocker, comprising storing EUV reticles in the reticle stocker and retrieving reticles from the reticle stocker, wherein

• the reticle is contained within an EIP comprising two or more components,
• the storing comprises moving the EIP containing a reticle to a storage position within the EUV reticle stocker;
• and
• the retrieving comprises removing an EIP containing a reticle from its storage position;
• and wherein
• the EIP components and the reticle are immobilized relative to one another when moved to or from the storage position and when in the storage position, by a clamping device not covering the EIP completely;
• the method further comprising
• supplying a purge gas to each storage position containing an EIP.

A stocker for storing at least one EUV reticle, wherein each of the at least one reticle is stored in one respective EUV inner pod (EIP), wherein the EIP comprises two or more EIP components which are immobilized relative to one another by a clamping device not covering the EIP completely, wherein the EIP comprises one or more retainers configured to immobilize the reticle stored inside the EIP relative to the EIP, when acted upon from outside the EIP, wherein the clamping device acts upon the retainer(s) to immobilize the reticle stored within the EIP, the stocker comprising:

• a loading port comprising an airlock and an assembler;
• a storage unit configured to store in respective storage positions EIPs each immobilized by one clamping device and each containing one reticle;
• a handler configured to move the clamped EIP containing the reticle to and from a respective storage position within the storage unit of the stocker;
• and
• a purge gas supply unit configured to supply a purge gas to the storage unit wherein:
• the airlock is configured to receive a double pod comprising an EUV outer pod (EOP) and an EIP containing a reticle from outside the stocker, wherein the EOP acts upon the retainer(s);
• and
• the assembler is configured to open the EOP without causing movement of EIP components and the reticle relative to one another;
• to attach said clamping device to and remove the clamping device from said EIP without causing movement of the EIP components and the reticle relative to one another;
• and to assemble an EOP around the unclamped EIP.