Inserts for spacing in reticle containers
AssigneeEntegris, Inc.
InventorsRuss V. Raschke, Brian Wiseman, Paul J. Magoon, Huaping Wang
Life of this patent
Estimating the term…
Abstract
Spacers include a base configured to be placed within depressions of one of a cover or a baseplate of a reticle pod, and a contact surface configured to contact the other of the cover and the baseplate. The spacers are configured to space the cover and the baseplate apart from one another such that sealing surfaces of the cover and the baseplate are separated by a gap. The depressions can be gripper pockets of the baseplate. Multiple spacers can be used in a reticle pod to provide the gap between sealing surfaces. The spacers can be installed to prepare a reticle pod for shipment.
Claims20
An article comprising:
- a spacer for a reticle pod, the spacer including:
- a base of the spacer configured to engage with a depression formed in one of a cover or a baseplate of the reticle pod;
- and
- a contact surface of the spacer configured to contact the other of the cover or the baseplate, wherein:
- the contact surface is configured to space the cover apart from the baseplate such that sealing surfaces included in the cover and the baseplate are spaced apart from one another by a gap.
A reticle pod, comprising:
- an inner pod including a baseplate and a cover;
- and
- one or more spacers, each spacer including:
- a base configured to engage with a depression formed in one of the baseplate or the cover;
- and
- a contact surface configured to contact the other of the baseplate or the cover, wherein
- the contact surface is configured to space the baseplate apart from the cover such that baseplate sealing surfaces included in the baseplate and cover sealing surfaces included in the cover are spaced apart from one another by a gap.
A method of preparing a reticle pod for shipment, comprising:
- placing one or more spacers into depressions formed in one of a cover or a baseplate of a reticle pod;
- and
- assembling the cover and the baseplate to form an inner pod of the reticle pod, wherein the spacers contact the cover and the baseplate;
- wherein the cover and the baseplate are separated by a gap.
Dependencies are inferred from the claim text.