Inspection system and inspection method using the same

Abstract

An inspection system includes: a single light source part which irradiates an incident light to an inspection object; a main lens through which reflected light, reflected from an inspection object and including a first polarization component and a second polarization component, passes; a beam splitter which splits a reflected light passing through a main lens into a first split light and a second split light; a first polarizer including a first filter area which selectively passes a first polarization component therethrough; a second polarizer including a second filter area which selectively passes a second polarization component therethrough; and an image sensor which generates a first captured image for a first polarization component and a second captured image for a second polarization component.

Dependencies are inferred from the claim text.