Vacuum pump system and control method
AssigneeShimadzu Corporation
InventorShingo TANAKA
Life of this patent
Estimating the term…
Loading patent…
AssigneeShimadzu Corporation
InventorShingo TANAKA
Estimating the term…
To properly set a predetermined threshold for the number of times of occurrence of an abnormality for issuing an alarm. A vacuum pump system includes a storage, a pump controller, and a setter. The storage stores a first threshold for the number of times of occurrence of the abnormality for outputting the alarm. The pump controller counts the number of times of occurrence of the abnormality caused in a vacuum pump, determines whether or not the number of times of occurrence of the abnormality is the first threshold or more, and outputs the alarm in a case where the number of times of occurrence of the abnormality is the first threshold or more. The setter sets or changes the first threshold on the basis of an operation state of the vacuum pump.
A vacuum pump system including a vacuum pump configured to pump gas by drive of a rotor by a motor, comprising:
A method for controlling a vacuum pump configured to pump gas by drive of a rotor by a motor, comprising:
Dependencies are inferred from the claim text.