Load port and method for opening/closing storage container
AssigneeSinfonia Technology Co., Ltd.
InventorsTatsuya Miura, Shinpei Kogiso, Yuki Ishihara, Tatsuru Ogawa, Atsushi Suzuki, Yuki Matsumoto
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AssigneeSinfonia Technology Co., Ltd.
InventorsTatsuya Miura, Shinpei Kogiso, Yuki Ishihara, Tatsuru Ogawa, Atsushi Suzuki, Yuki Matsumoto
Estimating the term…
A load port connected to a transport part includes: a base constituting a portion of a wall of the transport part; a stage on which a storage container is mounted; a stage driving mechanism configured to move the stage in a direction toward or away from the base; a door configured to be capable of opening/closing an opening of the base at a position facing a lid of the storage container mounted on the stage and to be capable of holding the lid disposed to face the opening in a state of closing the opening; a door driving mechanism configured to move the door between an opening position and a closing position; and a movement restricting part configured to restrict a movement of the stage in the direction away from the base by abutting against the stage.
A load port connected to a transport part, the load port comprising:
A method for opening/closing a storage container that stores a substrate, the method comprising:
Dependencies are inferred from the claim text.