Phase-change material (pcm) radio frequency (rf) switching device with thin self-aligned dielectric layer

A method of fabricating a phase-change material (PCM) switching device, the method comprising:

• providing a base dielectric layer;
• forming a heater element embedded in the base dielectric layer, the heater element comprising a first metal element and configured to generate heat in response to a current flowing therethrough;
• forming a self-aligned dielectric layer on the heater element, wherein the self-aligned dielectric layer comprises one of an oxide of the first metal element and a nitride of the first metal element, and the self-aligned dielectric layer is horizontally aligned with the heater element;
• forming a PCM region on the self-aligned dielectric layer, wherein the PCM region comprises a PCM operable to switch between an amorphous state and a crystalline state in response to the heat generated by the heater element;
• and
• forming two metal pads electrically connected to the PCM region.

A method of operating a phase-change material (PCM) switching device,

• the PCM switching device comprising:
• a base dielectric layer over a semiconductor substrate;
• a heater element embedded in the base dielectric layer, the heater element comprising a first metal element;
• a self-aligned dielectric layer disposed on the heater element, wherein the self-aligned dielectric layer comprises one of an oxide of the first metal element and a nitride of the first metal element, and the self-aligned dielectric layer is horizontally aligned with the heater element;
• a PCM region disposed on the self-aligned dielectric layer, wherein the PCM region comprises a PCM;
• and
• two metal pads electrically connected to the PCM region;
• the method comprising:
• generating a current flowing through the heater element to generate heat;
• switching the PCM between an amorphous state and a crystalline state in response to the heat generated by the heater element;
• and
• switching the PCM switching device in response to the amorphous state and the crystalline state.