Electronic devices including a source seal, and related methods and electronic systems
AssigneeMicron Technology, Inc.
InventorsLingyu Kong, Sok Han Wong
Life of this patent
Estimating the term…
Abstract
An electronic device comprises a source stack comprising one or more conductive materials. A source contact is adjacent to the source stack and a source seal is on a portion of the source contact. Tiers of alternating conductive materials and dielectric materials are adjacent to the source contact. Pillars extend through the tiers and the source contact and into the source stack. Additional electronic devices, electronic systems, and methods of forming the electronic devices are disclosed.
Claims20
An electronic device comprising:
- a source stack comprising one or more conductive materials;
- a source contact adjacent to the source stack, a source seat on a portion of the source contact;
- tiers of alternating conductive materials and dielectric materials adjacent to the source contact;
- and
- pillars extending through the tiers and the source contact and into the source stack.
An electronic device comprising:
- a source stack adjacent to a source contact;
- a tier stack comprising conductive materials and dielectric materials adjacent to the source stack;
- a source seal on a recessed portion of the source contact, the source seal configured as a continuous material on the recessed portion of the source contact;
- and
- pillars extending through the tier stack and the source contact and into the source stack.
A method of forming an electronic device, comprising:
- forming a dielectric material adjacent to a source contact, the dielectric material comprising a slit liner on sidewalls thereof;
- forming tiers of alternating dielectric materials and nitride materials adjacent to the dielectric material;
- forming pillars extending through the tiers and into a source stack adjacent to the source contact;
- forming a slit through the tiers and the dielectric material to expose the source contact, the slit laterally adjacent to the pillars;
- forming a tier liner on the slit liner and the tiers of alternating dielectric materials and nitride materials;
- forming a recess within the source contact and below the slit;
- forming a source seal material in the recess and in the slit;
- removing a portion of the source seal material to form a source seal adjacent to the source contact;
- replacing the nitride materials of the tiers with conductive materials;
- and
- forming a slit fill material adjacent to the source seal.
An electronic system, comprising:
- a processor operably coupled to an input device and an output device;
- and
- one or more electronic devices operably coupled to the processor, the one or more electronic devices comprising:
- strings of memory cells extending vertically through a tier stack comprising alternating dielectric materials and conductive materials;
- a source contact vertically adjacent to the tier stack, a source seal on a recessed portion of the source contact proximal to the tier stack and the source contact electrically coupled to the strings of memory cells;
- and
- a source stack below the source contact, the strings of memory cells extending vertically into the source stack.
Dependencies are inferred from the claim text.