Semiconductor storage device and semiconductor storage device manufacturing method
AssigneeKioxia Corporation
InventorYuuko KAWAGUCHI
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AssigneeKioxia Corporation
InventorYuuko KAWAGUCHI
Estimating the term…
A semiconductor storage device includes a stacked body where a conductive layer and an insulating layer are stacked a multiple number of times; a plate-shaped portion extending along a stacking direction of the stacked body and a first direction and dividing the stacked body along a second direction; and a pillar penetrating the stacked body. A width of the plate-shaped portion in the second direction at the same height as a conductive layer located at the top is larger than a width of the plate-shaped portion in the second direction at the same height as a conductive layer located at the bottom, and a width of the pillar in the second direction at the same height as the conductive layer located at the top is smaller than a width of the pillar in the second direction at the same height as the conductive layer located at the bottom.
A semiconductor storage device comprising:
A semiconductor storage device comprising:
A semiconductor storage device manufacturing method comprising:
Dependencies are inferred from the claim text.